Method for manufacturing a surface acoustic wave device

Coating processes – Direct application of electrical – magnetic – wave – or... – Chemical vapor deposition

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427100, 427124, 427125, 427250, 310313A, 310313R, 310313B, H01L 4108, B05D 306, C23C 1620

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active

054015448

ABSTRACT:
A surface acoustic wave device which can operate at a higher frequency range is produced by irradiation with a focused ion beam to produce a narrower electrode width and narrower spacing width between neighboring electrodes in contact with a piezoelectric body, without degrading the reliability of the device. The surface acoustic wave device includes a piezoelectric body 3 and interdigital electrodes 2a and 2b in close contact with the piezoelectric body 3 and formed by using the focused ion beam. In order to increase the frequency of the device, the piezoelectric body 3 may be formed on a substrate 1, for example of diamond.

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