Coating processes – Direct application of electrical – magnetic – wave – or... – Chemical vapor deposition
Patent
1993-08-19
1995-03-28
King, Roy V.
Coating processes
Direct application of electrical, magnetic, wave, or...
Chemical vapor deposition
427100, 427124, 427125, 427250, 310313A, 310313R, 310313B, H01L 4108, B05D 306, C23C 1620
Patent
active
054015448
ABSTRACT:
A surface acoustic wave device which can operate at a higher frequency range is produced by irradiation with a focused ion beam to produce a narrower electrode width and narrower spacing width between neighboring electrodes in contact with a piezoelectric body, without degrading the reliability of the device. The surface acoustic wave device includes a piezoelectric body 3 and interdigital electrodes 2a and 2b in close contact with the piezoelectric body 3 and formed by using the focused ion beam. In order to increase the frequency of the device, the piezoelectric body 3 may be formed on a substrate 1, for example of diamond.
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Fujimori Naoji
Hachigo Akihiro
Nakahata Hideaki
Shikata Shin-ichi
Fasse W. F.
Fasse W. G.
King Roy V.
Sumitomo Electric Industries Ltd.
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