Method for manufacturing a surface acoustic wave

Details Method for manufacturing a surface acoustic wave Method for manufacturing a surface acoustic wave

2007-05-03

2008-09-02

Vo, Peter (Department: 3729)

Metal working

Piezoelectric device making

C029S600000, C029S832000, C029S835000, C029S846000, C310S31300R

Reexamination Certificate

active

07418772

ABSTRACT:
In a manufacturing method for a SAW apparatus a first insulating layer is formed on the entire surface of a piezoelectric LiTaO3substrate. By using a resist pattern used for forming an IDT electrode, the first insulating layer in which the IDT electrode is to be formed is removed. An electrode film made of a metal having a density higher than Al or an alloy primarily including such a metal is disposed in the area in which the first insulating layer is removed so as to form the IDT electrode. The resist pattern remaining on the first insulating layer is removed. A second insulating layer is formed to cover the first insulating layer and the IDT electrode.

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