Method for manufacturing a strain detector

Details Method for manufacturing a strain detector Method for manufacturing a strain detector

2005-01-18

2005-01-18

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S025420, C029S592100, C029S620000, C029S621100, C029S841000, C029S854000, C073S766000, C073S777000, C427S079000, C427S096400, C427S108000, C427S125000

Reexamination Certificate

active

06842965

ABSTRACT:
A strain detector where water does not reach a strain-resistance element and which supplies stable output at all times is provided. In the strain detector, a first protective layer made of glass is disposed to cover an insulating substrate and the strain-resistance element. A second protective layer made of resins or glass for covering the first protective layer, and a thermistor for compensating the resistance of the strain-resistance element are disposed.

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patent: 2000-180255 (2000-06-01), None
Calibration technique for MEMS membrane type strain sensors; Li Cao; Tae Song Kim; Jia Zhou; Mantell, S.C.; Polla, D.L.; University/Government/Industry Microelectronics Symposium; Jun. 20-23, 1999; pp. 204-210.

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