Method for manufacturing a single electron transistor by using a

Details Method for manufacturing a single electron transistor by using a Method for manufacturing a single electron transistor by using a

1996-08-08

1998-01-20

Chaudhari, Chandra

Fishing, trapping, and vermin destroying

437 40, 437228, H01L 2100

Patent

active

057100519

ABSTRACT:
A method for the manufacture of a single electron transistor (SET) in a vacuum state, wherein the SET operates in room temperature, comprises the steps of: approaching an Au tip of a scanning tunneling microscopy (STM) on top of a silicon-substrate having a silicon oxide layer on top thereof to maintain a distance from top of the oxide layer to end of the Au tip of the STM; forming an Au cluster on top of the oxide layer by using a low field evaporation method employing the STM, thereby forming a two dimensional island structure on top of the oxide layer, wherein the low field evaporation method employing the STM generates an electronic pulse between top of the oxide layer and end of the Au tip of the STM by applying a voltage to the Au tip of the STM; forming a source and a drain to both sides of the Au cluster in the two dimensional island structure, respectively, in such a way that the Au cluster in the two dimensional island structure maintains a gap with the source and the drain, thereby forming an electron tunneling barrier on right and left of the Au cluster in the two dimensional island structure; and joining a gate on bottom of the silicon-substrate.

REFERENCES:
patent: 5051379 (1991-09-01), Bayer et al.
patent: 5266502 (1993-11-01), Okada et al.
patent: 5612233 (1997-03-01), Roesner et al.
patent: 5618760 (1997-04-01), Soh et al.

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