Method for manufacturing a semiconductor device with Schottky el

Details Method for manufacturing a semiconductor device with Schottky el Method for manufacturing a semiconductor device with Schottky el

1992-03-09

1993-07-20

Hearn, Brian E.

Fishing, trapping, and vermin destroying

20419212, 20419215, 148DIG139, 148DIG140, H01L 2100, H01L 2102, H01L 2144, H01L 21441

Patent

active

052293238

ABSTRACT:
A method for manufacturing a semiconductor device with a Schottky electrode includes the steps of subjecting the surface of a GaAs substrate to a sputtering etching process in a sputtering processing chamber of a sputtering device; and depositing Schottky electrode material by sputtering on the surface of the substrate to form a Schottky electrode in the processing chamber without exposing the substrate to the atmosphere.

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