Method for manufacturing a semiconductor device utilizing self-a

Details Method for manufacturing a semiconductor device utilizing self-a Method for manufacturing a semiconductor device utilizing self-a

1984-08-29

1986-11-18

Saba, William G.

Metal working

Method of mechanical manufacture

Assembling or joining

29578, 29580, 29591, 29577C, 148 15, 148174, 148187, 148DIG19, 148DIG20, 148DIG106, 148DIG139, 148DIG141, 148DIG147, 156643, 156652, 156653, 357 15, 357 71, H01L 2128, H01L 21306

Patent

active

046227350

ABSTRACT:
A method for manufacturing a semiconductor device of the invention comprises the steps of

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Kircher et al., "Interconnection Method for Integrated Circuit", I.B.M. Tech. Discl. Bull., vol. 13, No. 2, Jul. 1970, p. 436.
IBM Technical Disclosure Bulletin, vol. 21, No. 3, Aug. 1978, pp. 2150-1251, New York.
Nikkei Electronics, Sep. 1, 1980, pp. 62-65.

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