Method for manufacturing a semiconductor device utilizing an ano

Details Method for manufacturing a semiconductor device utilizing an ano Method for manufacturing a semiconductor device utilizing an ano

1995-03-10

1997-01-21

Valentine, Donald R.

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Controlling current distribution within bath

205106, 205107, 205108, 205124, 205229, 205316, 205324, C25D 500, C25D 518, C25D 1100, C25D 548

Patent

active

055956386

ABSTRACT:
An anodic oxide containing impurities at a low concentration and thereby improved in film quality, and a process for fabricating the same. The process comprises increasing the current between a metallic thin film and a cathode until a voltage therebetween reaches a predetermined value, and maintaining the voltage at the predetermined value thereafter.

REFERENCES:
patent: 2918416 (1959-12-01), Taylor
patent: 3020219 (1962-02-01), Franklin et al.

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