Method for manufacturing a semiconductor device

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Insulative housing or support

Reexamination Certificate

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C438S112000, C438S126000

Reexamination Certificate

active

07459348

ABSTRACT:
A method for manufacturing a semiconductor device formed by stacking a plurality of semiconductor elements on a substrate includes the steps of stacking the plurality of semiconductor elements on the substrate to form plural stages, placing the substrate substantially vertically and charging an underfill agent into spaces defined between the substrate and the corresponding semiconductor element and spaces defined among the stacked semiconductor elements through a nozzle from above side faces of the stacked semiconductor elements, and curing the charged underfill agent.

REFERENCES:
patent: 5427938 (1995-06-01), Matsumura et al.
patent: 5766982 (1998-06-01), Akram et al.
patent: 6232667 (2001-05-01), Hultmark et al.
patent: 7061103 (2006-06-01), Chen et al.
patent: 2002/0115237 (2002-08-01), Williams
patent: 11-354552 (1999-12-01), None

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