Method for manufacturing a semiconductor component and automatic

Boots – shoes – and leggings

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36446824, 36447401, 36447402, 36447421, G06F 1900, G06G 766

Patent

active

059699728

ABSTRACT:
An automated machine program generator (10) and a method for optimizing the manufacture of articles. The automated machine program generator (10) includes a data repository editor (11), a table parameter editor (13), and an optimizer editor (14). The data repository editor (11) collects data from various sources. The data is transformed and placed in a table (12). If necessary, the data in the table (12) is modified by the table parameter editor (13). The modified data is optimized by the optimizer editor (14) and transferred to a piece of equipment (15) for manufacturing the article.

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Sullivan et al, A control-to-target architecture for process control, IEEE Transactions on Semiconductor Manufacturintg, vol. 7 No. 2, pp. 134-148, May 1994.
Leang et al, Application of feed-forward control to a lithography stepper, 1992 IEEE/SEMI Int'l Semiconductor Manufacturing Science Symposium, pp. 79-84, 1992.
Leang et al, Applicatiion of feed-forward and feedback control to a photolithography sequence, 1992 IEEE/SEMI Int'l Semiconductor Manufacturing Science Symposium, pp. 143-147, 1992.

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