Optics: measuring and testing – Position or displacement
Reexamination Certificate
2007-12-25
2007-12-25
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Position or displacement
C359S572000
Reexamination Certificate
active
10491931
ABSTRACT:
In a method for producing a scale in the form of a phase grating, the scale itself, and a position measuring device including the scale, the scale includes two reflection layers located at a distance from one another on either side of a spacer layer. The production of the scale includes the following steps: provision of a first reflection layer, which is unbroken over its entire surface and fulfils the relationship A=R/η≧3, where R represents the degree of reflection and η represents the backscatter coefficient for electrons; application of the spacer layer to the first reflection layer; application of the second reflection layer to the spacer layer; and structuring of the second reflection layer by an electron beam lithography process.
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Flatscher Georg
Speckbacher Peter
Dr. Johannes Heidenhain GmbH
Kenyon & Kenyon LLP
Toatley , Jr. Gregory J.
Underwood Jarreas
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