Method for manufacturing a rotary anode for X-ray tube

Coating processes – Coating by vapor – gas – or smoke – Metal coating

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4272551, 4272552, 4272557, 427124, 427314, 427405, 378144, C23C 1600, H01J 3510

Patent

active

053524896

ABSTRACT:
A method for manufacturing a rotary anode for use in an X-ray tube is proposed. The method has the step of forming, on a graphite substrate plate, an intermediate layer of rhenium by subjecting a metallic chloride to the thermal decomposition CVD process at a substrate temperature of 1200.degree. C. or more. The method further has the step of forming, on the intermediate layer, an X-ray generating layer of tungsten or tungsten-rhenium alloy by subjecting a metallic fluoride to the hydrogen reduction thermal CVD process.

REFERENCES:
patent: 4482837 (1984-11-01), Koizumi et al.
patent: 4920012 (1990-04-01), Woodruff et al.
patent: 5122422 (1992-06-01), Rodhammer et al.

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