Method for manufacturing a read-only memory device

Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal

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148188, H01L 2122

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042552109

ABSTRACT:
A read only-memory (ROM) is manufactured by a process which produces memories having customized codes from partially completed semiconductor chips. The chips are manufactured to a step where a matrix of apertures or windows are formed in an oxide layer at every cross point of every potential code. Then, a silicon dioxide film is formed over the entire surface of the chip including the window apertures. At this stage, the chip is stored as a general purpose stock item. When an order is received to prepare a ROM chip with customized codes, a mask is formed to etch and reopen the apertures or windows in the dioxide film at the encoded cross points. Then, suitable contact material is deposited over the surface of the chip, thereby completing a contact at each of the reopened apertures or windows. As a result, the normal lead time required for a manufacturer to make a customized ROM is reduced from, say, 4.5 to 6 days to a period of approximately 1.5 to 2 days.

REFERENCES:
patent: 3576478 (1971-04-01), Watkins
patent: 3756876 (1973-09-01), Brown et al.
patent: 3914855 (1975-10-01), Cheney et al.
patent: 4067099 (1978-01-01), Ito et al.
Kawagoe et al., IEEE J. of Solid-State Circuits, vol. SC-11, No. 3, Jun. 1976, pp. 360-364.

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