Method for manufacturing a polishing pad having a compressed...

Details Method for manufacturing a polishing pad having a compressed... Method for manufacturing a polishing pad having a compressed...

2005-01-11

2005-01-11

Hail, III, Joseph J. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S006000, C451S008000, C451S526000, C451S529000, C451S533000, C451S534000, C264S040100, C264S327000, C264S328100, C264S328160

Reexamination Certificate

active

06840843

ABSTRACT:
A method for producing a polishing pad comprising (a) providing a porous polymer structure, (b) compressing at least a region of the porous polymer structure to provide a translucent region, and (c) forming a polishing pad comprising the porous polymer structure, whereby a polishing pad is produced comprising the translucent region. Also provided is a polishing pad produced according to this method, and a polishing pad comprising a region that is at least translucent, wherein the translucent region is porous, as well as a method of polishing a substrate using a pad of the invention.

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