Method for manufacturing a piezoelectric resonator

Details Method for manufacturing a piezoelectric resonator Method for manufacturing a piezoelectric resonator

2004-10-21

2008-08-05

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S830000, C029S831000, C029S832000, C029S846000, C219S121680

Reexamination Certificate

active

07406756

ABSTRACT:
A method for manufacturing a piezoelectric resonator is provided including: forming a resonator element having a plate-like base and a plurality of arms extending laterally from the base on a substrate made of crystal; emitting laser light for irradiating one surface and the other surface of the arms with laser light and for removing a region irradiated with the laser light, so as to form a groove having a predetermined cross sectional shape perpendicular to the longitudinal direction of the groove; forming a driving electrode on the resonator element.

REFERENCES:
patent: 4186480 (1980-02-01), Binder Kriegelstein et al.
patent: 5229180 (1993-07-01), Littmann
patent: 5809000 (1998-09-01), Choi
patent: 5952668 (1999-09-01), Baer
patent: 5958268 (1999-09-01), Engelsberg et al.
patent: 5986807 (1999-11-01), Fork
patent: 6034349 (2000-03-01), Ota
patent: 6048588 (2000-04-01), Engelsberg
patent: 6133986 (2000-10-01), Johnson
patent: 08-181557 (1996-07-01), None
patent: 08-242134 (1996-09-01), None
patent: 10-270813 (1998-10-01), None
patent: 2001-185987 (2001-07-01), None
patent: 2001-296469 (2001-10-01), None
patent: 2002-076806 (2002-03-01), None
patent: 2002-169133 (2002-06-01), None
patent: 2003-290942 (2003-10-01), None
Examination result issued in corresponding Japanese application.
Yangyuan, et al., “Development and Challenges of Lithography for ULSI”, Institute of Microelectronics, Peking University, 100871 China, (Chinese Journal of Semiconductors), vol. 23, No. 3, Mar. 2002 (pp. 225-237).
Liu, et al., “Application of litography technology in microelectronic manufacturing”, China Academic Journal Electronic Publishing House, Semiconductor Technology, vol. 26, No. 8, Aug. 2001 (pp. 37-39 and 48).

Affiliated with

Also associated with

Rating

Method for manufacturing a piezoelectric resonator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for manufacturing a piezoelectric resonator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for manufacturing a piezoelectric resonator will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4006305