Method for manufacturing a piezoelectric/electrostrictive...

Details Method for manufacturing a piezoelectric/electrostrictive... Method for manufacturing a piezoelectric/electrostrictive...

2006-02-07

2006-02-07

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S593000, C029S831000, C029S846000, C029S890100, C347S068000

Reexamination Certificate

active

06993813

ABSTRACT:
A piezoelectric/electrostrictive film-type actuator has a ceramic base and a piezoelectric/electrostrictive element, which has piezoelectric/electrostrictive films and electrode films and which is disposed on the ceramic base, and is driven in accordance with a dislocation of the piezoelectric/electrostrictive element. The piezoelectric/electrostrictive element is formed such that the piezoelectric/electrostrictive films and the electrode films are alternately laminated so as to construct the uppermost layer and the lowermost layer with the electrode films. Also, the piezoelectric/electrostrictive films have two layers and no pores, containing a different phase formed by a decomposed material thereof, in the boundary sandwiched therebetween. In addition, the upper layer of the two-layered piezoelectric/electrostrictive films is thicker than the lower layer. This piezoelectric/electrostrictive film-type actuator solves the problem in that a withstand voltage of the piezoelectric/electrostrictive films is likely to decrease, and effectively achieves a bending dislocation.

REFERENCES:
patent: 4237606 (1980-12-01), Niwa et al.
patent: 5376856 (1994-12-01), Takeuchi et al.
patent: 5475279 (1995-12-01), Takeuchi et al.
patent: 5831651 (1998-11-01), Usui et al.
patent: 5933170 (1999-08-01), Takeuchi et al.
U.S. Appl. No. 10/657,842, filed Sep. 9, 2003, Takeuchi et al.

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