Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2005-07-01
2009-06-30
Kim, Paul D (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603130, C029S603140, C029S603150, C029S603180, C216S062000, C216S066000, C216S067000, C360S122000, C360S317000, C451S005000, C451S041000
Reexamination Certificate
active
07552523
ABSTRACT:
A method and system for manufacturing a perpendicular magnetic recording transducer by a process that includes plating is described. The method and system include forming a chemical mechanical planarization (CMP) uniformity structure around a perpendicular magnetic recording pole. The CMP uniformity structure has a height substantially equal to a desired pole height. The method and system also include fabricating an insulator on the CMP uniformity structure and performing a CMP to remove a portion of the insulator. The CMP exposes a portion of the perpendicular magnetic recording pole and planarizes an exposed surface of the perpendicular magnetic recording transducer.
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He Li
Hu Yining
Liu Jun
Yang Danning
Kim Paul D
Virtual Law Partners LLP
Western Digital (Fremont) , LLC
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