Method for manufacturing a panel of TFT LCD having...

Details Method for manufacturing a panel of TFT LCD having... Method for manufacturing a panel of TFT LCD having...

2006-10-03

2006-10-03

Schechter, Andrew (Department: 2871)

Liquid crystal cells, elements and systems

Particular excitation of liquid crystal

Electrical excitation of liquid crystal

C349S043000, C438S158000

Reexamination Certificate

active

07116384

ABSTRACT:
A method for manufacturing a panel of a thin film transistor liquid crystal display device with three mask processes is disclosed. The method includes following steps: forming a transparent conductive layer, a first insulating layer, and a second metal layer on a transparent substrate in sequence; forming a source area, a drain area, a transparent electrode area, and data signal lines through a halftone photolithography and an etching; forming a semiconducting layer and a second insulating layer on the substrate in sequence; forming a semiconducting channel area in a thin film transistor area and contacts on the source area, the drain area, and the data signal lines through a photolithography and an etching; forming a third metal layer and a third insulating layer on the substrate in sequence; forming scanning signal lines and gate lines through a photolithography and an etching.

REFERENCES:
patent: 7023021 (2006-04-01), Yamazaki et al.

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