Method for manufacturing a multi-layer capacitor

Details Method for manufacturing a multi-layer capacitor Method for manufacturing a multi-layer capacitor

1993-12-10

1994-09-20

Hall, Carl E.

Metal working

Electric condenser making

Solid dielectric type

156646, 156650, 361304, H01G 410

Patent

active

053476964

ABSTRACT:
For manufacturing a multi-layer capacitor, a layer structure (2, 3, 4) is applied onto a substrate (1), said layer structure comprising conductive layers (2, 4) and dielectric layers (3) in alternation and successive conductive layers (2, 4) therein being respectively formed of one of two different materials which are selectively etchable relative to one another. Two openings (6, 8) are produced in the layer structure (2, 3, 4), whereby under-etchings (21, 41 ) are formed in the first opening (6) by selective etching of the one material and are formed in the second opening (8) by selective etching of the other material, so that only the conductive layers (2, 4) of the non-etched material respectively adjoin contacts (91, 92) introduced into the openings (6, 8).

REFERENCES:
patent: 4453199 (1984-06-01), Ritchie et al.
patent: 4700457 (1987-10-01), Matsukawa
patent: 5135883 (1992-08-01), Bae et al.
patent: 5153813 (1992-10-01), Oehrlein et al.

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