Method for manufacturing a monolithic ink-jet printhead

Metal working – Method of mechanical manufacture – Electrical device making

Reexamination Certificate

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Details

C029S617000, C029S619000, C029S621000, C029S890100, C347S047000, C347S056000, C347S059000, C347S063000, C347S065000

Reexamination Certificate

active

10740573

ABSTRACT:
A method for manufacturing the same, wherein the monolithic ink-jet printhead includes a manifold for supplying ink, an ink chamber having a hemispheric shape, and an ink channel formed monolithically on a substrate; a silicon oxide layer, in which a nozzle for ejecting ink is centrally formed in the ink chamber, is deposited on the substrate; a heater having a ring shape is formed on the silicon oxide layer to surround the nozzle; a MOS integrated circuit is mounted on the substrate to drive the heater and includes a MOSFET and electrodes connected to the heater. The silicon oxide layer, the heater, and the MOS integrated circuit are formed monolithically on the substrate. Additionally, a DLC coating layer having a high hydrophobic property and high durability is formed on an external surface of the printhead.

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Note: JP'037=AU'720.
Tseng et al, A Novel Microinjector with Virgual Chamber Neck, pp. 57-62, (1998) 0-7803-4412-X/98IEEE.

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