Method for manufacturing a miniaturized solid state mass spectro

Details Method for manufacturing a miniaturized solid state mass spectro Method for manufacturing a miniaturized solid state mass spectro

1994-10-07

1996-02-20

Wilczewski, Mary

Fishing, trapping, and vermin destroying

437927, 1566261, 1566441, H01L 21465

Patent

active

054928672

ABSTRACT:
A method for forming a solid state mass spectrograph for analyzing a sample gas is provided in which a plurality of cavities are formed in a substrate, preferably, a semiconductor. Each of these cavities forms a chamber into which a different component of the mass spectrograph is provided. A plurality of orifices are formed between each of the cavities, forming an interconnecting passageway between each of the chambers. A dielectric layer is provided inside the cavities to serve as a separator between the substrate and electrodes to be later deposited in the cavity. An ionizer is provided in one of the cavities and an ion detector is provided in another of the cavities. The formed substrate is provided in a circuit board which contains interfacing and controlling electronics for the mass spectrograph. Preferably, the substrate is formed in two halves and the chambers are formed in a corresponding arrangement in each of the substrate halves. The substrate halves are then bonded together after the components are provided therein.

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