Method for manufacturing a microelectromechanical component,...

Active solid-state devices (e.g. – transistors – solid-state diode – Lead frame – With structure for mounting semiconductor chip to lead frame

Reexamination Certificate

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C257S704000, C438S051000

Reexamination Certificate

active

07982291

ABSTRACT:
The invention relates to microelectromechanical components, like microelectromechanical gauges used in measuring e.g. acceleration, angular acceleration, angular velocity, or other physical quantities. The microelectromechanical component, according to the invention, comprises a microelectromechanical chip part, sealed by means of a cover part, and an electronic circuit part, suitably bonded to each other. The aim of the invention is to provide an improved method of manufacturing a microelectromechanical component, and to provide a microelectromechanical component, which is applicable for use particularly in small microelectromechanical sensor solutions.

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International Search Report PCT/FI2006/050508 filed Nov. 21, 2006.
US Office Action, U.S. Appl. No. 12/292,435, Date: Feb. 15, 2011, pp. 1-14.

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