Method for manufacturing a micro light valve

Details Method for manufacturing a micro light valve Method for manufacturing a micro light valve

1993-11-09

1995-02-28

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

437225, H01L 2100, H01L 2102, H01L 21465

Patent

active

053937104

ABSTRACT:
A method is disclosed for manufacturing a very fast micro light valve of the type used to control the passage of light through a pixel. The method comprises preparing a substrate, which can be made of glass, and forming transparent electrodes on the main surface of the substrate. Next an insulating layer is deposited on the substrate and a first sacrificial layer is formed on the insulating layer. A pattern shifting element layer is formed on the first sacrificial layer and a second sacrificial layer is formed on the substrate and provided with a shifting element layer. After portions of the sacrificial layers are removed by etching to form a frame contact portion, a patterned frame layer is formed on the frame contact portion. Then a frame and a shifting element capable of moving in the frame under an applied external electrostatic force are formed by removing the remaining sacrificial layers.

REFERENCES:
patent: 5181016 (1993-01-01), Lee
patent: 5206749 (1993-04-01), Zavracky et al.

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