Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2004-10-18
2009-10-20
Banks, Derris H (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S603030, C029S603070, C029S603140, C360S324100
Reexamination Certificate
active
07603763
ABSTRACT:
A method for manufacturing a magnetoresistive multilayer film. An antiferromagnetic layer, a pinned-magnetization layer, a nonmagnetic spacer layer and a free-magnetization layer are laminated on a substrate in this order. A film for the antiferromagnetic layer is deposited by a sputtering process as oxygen gas is added to a gas for sputtering. A film for an extra layer interposed between the substrate and the antiferromagnetic layer is deposited by a sputtering process as oxygen gas is added to a gas for sputtering. A film for the antiferromagnetic layer is deposited by a sputtering process with a gas mixture of argon and another gas of larger atomic number than argon.
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Djayaprawira David Djulianto
Nagai Motonobu
Tsunekawa Koji
Banks Derris H
Canon Anelva Corporation
Hogan & Hartson LLP
Nguyen Tai
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