Method for manufacturing a magnetic write head

Details Method for manufacturing a magnetic write head Method for manufacturing a magnetic write head

2005-11-23

2008-11-25

Kim, Paul D (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603130, C029S603150, C029S603180, C216S062000, C216S065000, C216S066000, C204S192340, C360S122000, C360S317000, C451S005000, C451S041000

Reexamination Certificate

active

07454828

ABSTRACT:
A method for measuring recession in a wafer undergoing an asymmetrical ion mill process. The method includes the formation of first and second reference features and possibly a dummy feature. The reference features are constructed such that the location of the midpoint between them is unaffected by the asymmetrical ion mill. By measuring the distance between a portion of the dummy feature and the midpoint between the reference features, the amount of recession of the dummy feature can be measured. The measurement can be used to calculate the relative location of the flare to the read sensor rear edge through overlay information. By keeping the angles of the sides of the features steep (ie. nearly parallel with the direction in which the ion mill is asymmetrical) the amount of material consumed on each of the reference features is substantially equal and the midpoint between the reference features is substantially stationary.

REFERENCES:
patent: 5995343 (1999-11-01), Imamura
patent: 6521902 (2003-02-01), Chang et al.
patent: 6651313 (2003-11-01), Chang et al.
patent: 7002775 (2006-02-01), Hsu et al.
patent: 2005/0218324 (2005-10-01), Street
patent: 2006/0143900 (2006-07-01), Peterson et al.

Affiliated with

Also associated with

Rating

Method for manufacturing a magnetic write head does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for manufacturing a magnetic write head, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for manufacturing a magnetic write head will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4042302