Etching a substrate: processes – Nongaseous phase etching of substrate – Etching using radiation
Patent
1995-06-06
1997-01-28
Chea, Thorl
Etching a substrate: processes
Nongaseous phase etching of substrate
Etching using radiation
216 52, 216 75, 360103, 360104, G11B 548
Patent
active
055974961
ABSTRACT:
A method of manufacturing a magnetic head suspension, wherein a wiring member for connecting a magnetic head element with a read/write amplifier circuit board is integrally formed with the suspension, which includes the step of: (1) forming a laminated plate having a flexible insulating base material which has an electrically conductive layer on one surface and a springy metal layer on the other surface; (2) photoetching the electrically conductive layer of the laminated plate to form a metal mask having a desired shape which does not cover an exposed area of the flexible insulating base material; (3) removing the flexible insulating base material from the exposed area; (4) photoetching the metal mask to produce a circuit wiring pattern; (5) producing a surface protecting layer on the surface of the circuit wiring pattern; and (6) photoetching the springy metal layer and bending the springy metal layer to form a suspension having a desired shape.
REFERENCES:
patent: 3503815 (1970-03-01), Johnson
patent: 4432027 (1984-02-01), Higuchi
patent: 4823217 (1989-04-01), Kato et al.
patent: 5339217 (1994-08-01), Cohen et al.
Hirofumi Matsumoto
Masaichi Inaba
Yasuyuki Tanaka
Chea Thorl
Nippon Mektron Ltd.
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