Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
Patent
1995-10-31
1999-02-09
Breneman, R. Bruce
Etching a substrate: processes
Nongaseous phase etching of substrate
Using film of etchant between a stationary surface and a...
252 791, 51308, 51309, 501 4, B44C 122, C03C 1000
Patent
active
058689532
ABSTRACT:
A method for manufacturing a magnetic disk substrate includes a step of polishing a glass-ceramic having a crystal phase consisting of crystal grains having an average diameter of less than 3 .mu.m with a polishing material having a grain diameter smaller than the diameter of the crystal grain. In one aspect of the invention, the glass-ceramic includes lithium disilicate (Li.sub.2 O--2SiO.sub.2) and alpha-quartz (alpha-SiO.sub.2) as predominant crystal phases and grown crystal grains of the alpha-quartz each have a globular grain structure consisting of aggregated particles and have a diameter within a range of 0.3 .mu.m-3.0 .mu.m.
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Karasawa Yoshio
Kawasaki Nobuo
Kawashima Yasuyuki
Maekawa Masashi
Adjodha Michael E.
Breneman R. Bruce
Kabushiki Kaisya Ohara
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