Metal working – Method of mechanical manufacture – Fluid pattern dispersing device making – e.g. – ink jet
Reexamination Certificate
2005-09-27
2009-06-23
Trinh, Minh (Department: 3729)
Metal working
Method of mechanical manufacture
Fluid pattern dispersing device making, e.g., ink jet
C029S025350, C029S890090, C347S068000, C216S027000
Reexamination Certificate
active
07549223
ABSTRACT:
The method for manufacturing a liquid ejection head comprising a diaphragm which serves as portions of pressure chambers connected to nozzles through which liquid is ejected, and piezoelectric bodies which deform the diaphragm, the method comprises: an electrical wire forming step of removing at least a part of a silicon substrate, and forming electrical wires for supplying drive signals to drive the piezoelectric bodies, in sections where the silicon substrate has been removed; a piezoelectric body forming step of forming the piezoelectric bodies on sections where the silicon substrate has not been removed at least in the electrical wire forming step; and a diaphragm forming step of forming the diaphragm on a side of the piezoelectric bodies opposite to the silicon substrate.
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Birch & Stewart Kolasch & Birch, LLP
FUJIFILM Corporation
Nguyen Tai
Trinh Minh
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