Method for manufacturing a liquid ejecting head

Metal working – Piezoelectric device making

Reexamination Certificate

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Details

C029S890100, C029S831000, C029S832000, C438S021000

Reexamination Certificate

active

07069631

ABSTRACT:
A piezoelectric structure includes a vibrational plate and a piezoelectric film. The vibrational plate includes a layer of a monocrystal material, a polycrystal material, a monocrystal material doped with an element which is different from an element constituting the monocrystal material, or a polycrystal material doped with an element which is different from an element constituting the polycrystal materials. Oxide layers sandwich the aforementioned layer. The piezoelectric film has a single orientation crystal or monocrystal structure.

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