Method for manufacturing a liquid crystal display device with th

Fishing – trapping – and vermin destroying

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437181, 437 41, 437909, 437228, 156652, 156656, 156657, 357 4, 357 237, H01L 21306

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active

050325361

ABSTRACT:
There is disclosed a liquid crystal color display of the active matrix type. A method of fabricating the display is initiated by depositing a transparent conductive material of indium tin oxide (ITO) as a thin layer onto a glass plate. Then chromium is deposited as an opaque film onto the ITO layer. The two layers are selectively removed, using a first mask pattern. A layer of an insulator consisting of Si.sub.3 N.sub.4 is deposited on the laminate within a reducing atmosphere of plasma. An I-type amorphous silicon layer is formed on the insulator layer. A highly doped N-type amorphous silicon layer is then formed. The N-type silicon layer, the I-type silicon layer, and the silicon nitride layer are selectively removed. An aluminum layer is formed on the laminate and then selectively etched away. Finally, the chromium layer is selectively etched away to form gates, gate leads, pixel electrodes, sources, drains and drain leads.

REFERENCES:
patent: 4558340 (1985-12-01), Schachter et al.
patent: 4651185 (1987-03-01), Holmberg et al.
patent: 4778560 (1988-10-01), Takeda et al.
patent: 4933296 (1990-06-01), Parks et al.

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