Method for manufacturing a liquid crystal display device

Details Method for manufacturing a liquid crystal display device Method for manufacturing a liquid crystal display device

1998-12-17

2000-12-05

Tran, Andrew

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

438158, 438159, 438720, H01L 2100, H01L 21302

Patent

active

061565830

ABSTRACT:
A method of manufacturing an LCD requires only 4 masking while preventing undercutting of a semiconductor layer and includes the steps of etching a passivation layer, an a-Si layer and a gate insulating layer simultaneously by using CF.sub.4 /He gas. The flow ratio of the He gas to CF.sub.4 gas is preferably about 15% to about 35%.

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