Etching a substrate: processes – Forming or treating electrical conductor article – Adhesive or autogenous bonding of self-sustaining preforms
Patent
1996-05-30
1997-09-09
Picardat, Kevin
Etching a substrate: processes
Forming or treating electrical conductor article
Adhesive or autogenous bonding of self-sustaining preforms
H01L 2160
Patent
active
056656505
ABSTRACT:
Photoimageable dielectric materials are coated on substrates, selectively exposed and developed, whereby small vias and interconnection openings are formed between adjacently spaced circuit layers. A conductive paste may be used to provide sequential layer interconnection and surface planarization. No adhesives are required in the manufacture of a circuit assembly having multiple circuit and dielectric layers, and the manufacturing method avoids the requirement for drilled through holes and blind vias.
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"New Avenue for Microvias", Electronics Engineering Times, Mar. 18, 1996, p. 68.
Glatzel Donald Herman
Lauffer John Matthew
Russell David John
International Business Machines - Corporation
Picardat Kevin
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