Method for manufacturing a fluid ejection device

Details Method for manufacturing a fluid ejection device Method for manufacturing a fluid ejection device

2007-11-13

2007-11-13

Tugbang, A. Dexter (Department: 3729)

Metal working

Method of mechanical manufacture

Fluid pattern dispersing device making, e.g., ink jet

C029S830000, C029S831000, C029S832000, C216S027000

Reexamination Certificate

active

10834777

ABSTRACT:
A method for manufacturing a fluid ejection device includes providing a sacrificial structure substantially overlying a semiconductor substrate. The structure has a shape configured to define an ink chamber, ink manifold, and a nozzle. The method also includes providing a first metal adjacent the sacrificial structure and substantially overlying the substrate and removing the sacrificial structure to form the ink chamber and the nozzle. The method further includes removing a portion of the first and second sacrificial materials to form the sacrificial structure.

REFERENCES:
patent: 4229265 (1980-10-01), Kenworthy
patent: 4246076 (1981-01-01), Gardner
patent: 4296421 (1981-10-01), Hara et al.
patent: 4374707 (1983-02-01), Pollack
patent: 4412224 (1983-10-01), Sugitani
patent: 4438191 (1984-03-01), Cloutier et al.
patent: 4455561 (1984-06-01), Boyden et al.
patent: 4528577 (1985-07-01), Cloutier et al.
patent: 4532530 (1985-07-01), Hawkins
patent: 4789425 (1988-12-01), Drake et al.
patent: 4984664 (1991-01-01), Sugano
patent: 5016024 (1991-05-01), Lam et al.
patent: 5122812 (1992-06-01), Hess et al.
patent: 5159353 (1992-10-01), Fasen et al.
patent: 5167776 (1992-12-01), Bhaskar et al.
patent: 5211806 (1993-05-01), Wong et al.
patent: 5236572 (1993-08-01), Lam et al.
patent: 5322594 (1994-06-01), Bol
patent: 5635968 (1997-06-01), Bhaskar et al.
patent: 5796416 (1998-08-01), Silverbrook
patent: 6007188 (1999-12-01), MacLeod et al.
patent: 6045215 (2000-04-01), Coulman
patent: 6113216 (2000-09-01), Wong
patent: 6113221 (2000-09-01), Weber
patent: 6123413 (2000-09-01), Agarwal et al.
patent: 6155676 (2000-12-01), Etheridge, III et al.
patent: 6161923 (2000-12-01), Pidwerbecki et al.
patent: 6180427 (2001-01-01), Silverbrook
patent: 6227654 (2001-05-01), Silverbrook
patent: 6243113 (2001-06-01), Silverbrook
patent: 6244691 (2001-06-01), Silverbrook
patent: 6254219 (2001-07-01), Agarwal et al.
patent: 6267471 (2001-07-01), Ramaswami et al.
patent: 6273544 (2001-08-01), Silverbrook
patent: 6299294 (2001-10-01), Regan
patent: 6299300 (2001-10-01), Silverbrook
patent: 6305788 (2001-10-01), Silverbrook
patent: 6309048 (2001-10-01), Silverbrook
patent: 6310639 (2001-10-01), Kawamura et al.
patent: 6315384 (2001-11-01), Ramaswami et al.
patent: 6318849 (2001-11-01), Silverbrook
patent: 6322201 (2001-11-01), Beatty et al.
patent: 6328405 (2001-12-01), Weber et al.
patent: 6336713 (2002-01-01), Regan et al.
patent: 6357865 (2002-03-01), Kubby et al.
patent: 6364461 (2002-04-01), Silverbrook
patent: 6365058 (2002-04-01), Beatty et al.
patent: 6371596 (2002-04-01), Maze et al.
patent: 6375313 (2002-04-01), Adavikolanu et al.
patent: 6390603 (2002-05-01), Silverbrook
patent: 6402296 (2002-06-01), Cleland et al.
patent: 6402300 (2002-06-01), Silverbrook
patent: 6416167 (2002-07-01), Silverbrook
patent: 6420196 (2002-07-01), Silverbrook
patent: 6423241 (2002-07-01), Yoon et al.
patent: 6425651 (2002-07-01), Silverbrook
patent: 6439689 (2002-08-01), Silverbrook
patent: 6439699 (2002-08-01), Silverbrook
patent: 6443558 (2002-09-01), Silverbrook
patent: 6451216 (2002-09-01), Silverbrook
patent: 6460778 (2002-10-01), Silverbrook
patent: 6460971 (2002-10-01), Silverbrook
patent: 6464340 (2002-10-01), Silverbrook
patent: 6475402 (2002-11-01), Nordstrom et al.
patent: 6481831 (2002-11-01), Davis et al.
patent: 6482574 (2002-11-01), Ramaswami et al.
patent: 6488358 (2002-12-01), Silverbrook et al.
patent: 6488362 (2002-12-01), Silverbrook
patent: 6489084 (2002-12-01), Pidwerbecki et al.
patent: 6491833 (2002-12-01), Silverbrook
patent: 6503408 (2003-01-01), Silverbrook
patent: 6505912 (2003-01-01), Silverbrook et al.
patent: 6508546 (2003-01-01), Silverbrook
patent: 6520624 (2003-02-01), Horvath et al.
patent: 6530653 (2003-03-01), Le et al.
patent: 6535237 (2003-03-01), Wong
patent: 6540325 (2003-04-01), Kawamura et al.
patent: 6543880 (2003-04-01), Akhavain et al.
patent: 6547364 (2003-04-01), Silverbrook
patent: 6547371 (2003-04-01), Silverbrook
patent: 6557978 (2003-05-01), Silverbrook
patent: 6561625 (2003-05-01), Maeng et al.
patent: 6588882 (2003-07-01), Silverbrook
patent: 6598964 (2003-07-01), Silverbrook
patent: 6623108 (2003-09-01), Silverbrook
patent: 6627467 (2003-09-01), Haluzak et al.
patent: 6634735 (2003-10-01), Silverbrook
patent: 6641254 (2003-11-01), Boucher et al.
patent: 6644786 (2003-11-01), Lebens
patent: 6644793 (2003-11-01), Silverbrook
patent: 6648453 (2003-11-01), Silverbrook
patent: 6652074 (2003-11-01), Silverbrook
patent: 6652082 (2003-11-01), Silverbrook
Aden, J. Stephen et al., The Third-Generation HP Thermal InkJet Printhead, Hewlett-Packard Journal, Feb. 1994, pp. 41-45.
Beeson, Rob, Thermal Inkjet: Meeting the Applications Challenge, printed from website http://www.hp.com/oeminkjet/reports/techpress-6.pdf on Jan. 7, 2004, 4 pages.
Lee, Jae-Duk et al., A Thermal Inkjet Printhead with a Monolithically Fabricated Nozzle Plate and Self-Aligned Ink Feed Hole, Journal of Microelectromechanical Systems, vol. 8, No. 3, Sep. 1999, pp. 229-236.

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