Method for manufacturing a ferroelectric member element...

Details Method for manufacturing a ferroelectric member element... Method for manufacturing a ferroelectric member element...

2005-08-26

2011-12-27

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S890100, C029S846000, C347S068000, C347S071000, C310S328000, C310S363000

Reexamination Certificate

active

08082640

ABSTRACT:
A method for manufacturing a ferroelectric member element structure having a ferroelectric member film, and lower and upper electrodes between which the ferroelectric member film is sandwiched, includes the steps of: forming a buffer layer having pattern-shaped oriented growth on a monocrystal substrate; performing oriented growth of the lower electrode layer on the buffer layer; performing oriented growth of the ferroelectric member film to cover the buffer layer and the lower electrode layer; and removing a portion of the ferroelectric member film other than the portion having the oriented growth achieved along the pattern of the buffer layer, by means of an etching treatment.

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