Method for manufacturing a component, in particular a...

Details Method for manufacturing a component, in particular a... Method for manufacturing a component, in particular a...

2005-08-23

2005-08-23

Everhart, Caridad (Department: 2825)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Thermally responsive

C438S071000, C257S467000

Reexamination Certificate

active

06933166

ABSTRACT:
A method of manufacturing a component, in particular a thermal sensor, and a thermal sensor. The component has at least two regions having different heat conductivities, a surface region being created in a substrate and the heat conductivity of the surface region being lower than that of the surrounding substrate. For producing a flat topography on the component a layer is created which covers the surface region. The layer and the surface region have at least approximately similar physical properties.

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