Metal working – Piezoelectric device making
Reexamination Certificate
2007-07-24
2007-07-24
Trinh, Minh (Department: 3729)
Metal working
Piezoelectric device making
C029S592100, C029S830000, C029S025030, C029S025420, C310S311000, C310S328000, C333S193000
Reexamination Certificate
active
11158725
ABSTRACT:
A piezoelectric actuator is provided, including comb-shape piezoelectric actuators, each including a plurality of piezoelectric layers. The actuators are made by a process including the steps of (1) preparing a plurality of piezoelectric material green sheets on which electrode films are formed and forming slits on a first green sheet using a punch and a die, (2) pulling up the first green sheet using a stripper, (3) pulling up a top portion of the punch slightly from the lowest portion of the pulled up first green sheet, (4) forming second slits in a second green sheet by the punch, (5) pulling up the second green sheet jointly with the first green sheet, (6) pulling up the top portion of the punch slightly from the lowest portion of the pulled up second green sheet, and thereafter laminating green sheets by repeating steps (4) through (6). The layers are thereafter fired.
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Kitamura Kazumasa
Takahashi Nobuo
Takeuchi Yukihisa
Tsuji Hiroyuki
Burr & Brown
NGK Insulators Ltd.
Nguyen Donghai D.
Trinh Minh
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