Method for manufacturing a cathode

Details Method for manufacturing a cathode Method for manufacturing a cathode

1995-08-29

1997-01-21

Nguyen, Tuan H.

Fishing, trapping, and vermin destroying

437916, 437974, 148DIG135, H01L 2170

Patent

active

055959334

ABSTRACT:
A low-power cathode can be obtained by arranging it on a substrate (1), preferably of silicon, which is entirely or partly removed at the location of the emissive structure (11) by means of, for example, anisotropic etching. Because of its low power, the cathode is particularly suitable for multi-beam applications.

REFERENCES:
patent: 3959037 (1976-05-01), Gutierrez et al.
patent: 4251909 (1981-02-01), Hoeberechts
patent: 4904895 (1990-02-01), Tsukamoto et al.
patent: 5110373 (1992-05-01), Nauger
patent: 5354695 (1994-10-01), Leedy

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