Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge
Patent
1992-05-20
1993-11-02
Valentine, Donald R.
Chemistry: electrical and wave energy
Processes and products
Electrostatic field or electrical discharge
20419215, 20419223, 20419217, 156653, C25F 312, C25F 314
Patent
active
052581071
ABSTRACT:
In a method of making a cantilever for atomic force micoscopes, to provide a method of manufacturing a high-resolution cantilever having a sharpened metal needle by introducing an electrolytic polishing process. In the method of making a cantilever, an erect metal structure, an electrode layer and an electric insulation layer are formed, and they are subjected to the electrolytic polishing process to allow a large number of erect metal structures formed on a silicon wafer to be formed into sharpened metal needles at a time. The cantilever having a sharpened metal needle manufactured by the method of this invention makes it possible to measure with high resolution specimen surface with deep grooves and holes and high projections that cannot be measured by the conventional cantilever having a pyramidal needle.
REFERENCES:
patent: 4916002 (1990-04-01), Carver
patent: 5035780 (1991-07-01), Suzuki et al.
patent: 5085746 (1992-02-01), Musselman et al.
patent: 5145564 (1992-09-01), Lemke et al.
Honma Katsunori
Sakuhara Toshihiko
Yoshida Hitoshi
Adams Bruce L.
Seiko Instruments Inc.
Valentine Donald R.
Wilks Van C.
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