Method for manufacture of reflection-proof film

Coating processes – Optical element produced

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350164, 350165, 427 82, 427164, 427166, 427248, 427255, 427419, G02B 110, C03C 1722

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039580423

ABSTRACT:
This invention relates to a method for easily vacuum depositing a reflection-proof film having a required refractive index on a substrate such as of lens or semiconductor. Two or more substances each having a different refractive index are mixed in such a proportion that the resultant mixture will acquire a required refractive index. Then, this mixture is divided into a plurality of equal proportions each of an amount to give a vacuum deposited film having a thickness of not more than 1/20 .lambda.. If the vaporization temperatures of the two substances differ by more than 400.degree.C, a two layer film will result. The fractions of the mixture are vacuum deposited consecutively one on top of another until the accumulated total of film thickness reaches a predetermined value.

REFERENCES:
patent: 3706485 (1972-12-01), Fawcett
patent: 3712711 (1973-01-01), Adachi
Furman, "Synthesis of Neutral Antireflection Coatings" in Optics and Spectroscopy 21(4), 1966, pp. 280-283.
Fujiwara "Refractive Indices of Evaporated Cerium Dioxide-Cerium Fluoride Films" in J. Opt. Soc. Am. 53(7), p. 880, 1963.
Harris et al., "A Method for the Evaporation of Alloys" in J. of Applied Physics, 19, pp. 739-741, 1948.
Umerov et al., "Preparation of Two Layer Achromatic Antireflection Coatings" in Optics & Spectroscopy 26(6), pp. 556-558, 1969.

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