Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-09-19
2006-09-19
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S101000, C700S100000, C438S905000
Reexamination Certificate
active
07110845
ABSTRACT:
Manufacturing equipment performs different processes, including a first process that produces a reaction products and a second process that removes the reaction products, in a same chamber. The amount of reaction products in the chamber is monitored, and a priority order between the first and the second processes is set based on the monitored amount of the reaction products. The order of the first and the second processes is determined based on the set priority order. The amount of reaction products can be kept within an acceptable range without performing a long-period lot-to-lot cleaning, and a high manufacturing efficiency is realized.
REFERENCES:
patent: 6136211 (2000-10-01), Qian et al.
patent: 6544345 (2003-04-01), Mayer et al.
patent: 6645303 (2003-11-01), Frankel et al.
patent: 6802933 (2004-10-01), Khan et al.
patent: 6814814 (2004-11-01), Collins et al.
patent: 6911398 (2005-06-01), Narita et al.
patent: 2002/0155714 (2002-10-01), Suzuki
patent: A 11-214356 (1999-08-01), None
Garland Steven R.
Kawasaki Microelectronics Inc.
Picard Leo
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