Method for managing semiconductor characteristic evaluation...

Data processing: measuring – calibrating – or testing – Measurement system – History logging or time stamping

Reexamination Certificate

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Reexamination Certificate

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07319940

ABSTRACT:
A management method for data in a semiconductor characteristic evaluation apparatus comprised of a control unit, a memory unit, and input/output units includes steps for selecting the workspace including the test programs for testing a plurality of wafer types, for storing the test results in the selected workspace as histories, and for searching for the desired test results from the histories of the stored test results.

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European Search Report for European Patent Application No. 06101154.0, Jun. 20, 2006.

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