Method for making ultrapure sulfuric acid

Distillation: processes – separatory – With disparate physical separation – Of entrained particles from a vapor or gas

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203 12, 203 71, 203 86, 203 87, 203 98, 203 99, 203DIG2, 134 12, 156642, 202158, 202161, 2021856, 202186, 202197, 423531, B01D 314, C01B 1790

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051640490

ABSTRACT:
Method for the production of ultrapure sulfuric acid including distillation of sulfuric acid material for the removal of soluble impurities and insoluble and non-volatile particles of 10 microns to 0.2 micron or less in size. Reprocessing is also provided. Distillation takes place in a distillation chamber having walls which are provided with means within the chamber to provide smooth convective upward flow of distilling liquid and vapor proximate the walls and means for smooth convective downward flow substantially centrally of the distillation chamber. Redirection means and packing together with reflux means insure the washing of rising vapor and direct the condensing vapor substantially centrally of the distillation chamber. Ultrapure sulfuric acid is also provided having 5 or less particles per cubic centimeter of a size of 0.5 micron and larger and less than 10 ppb of any specific trace impurity such as cations.

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