Method for making UHP tungsten hexafluoride

Details Method for making UHP tungsten hexafluoride Method for making UHP tungsten hexafluoride

1999-07-22

2000-08-15

Dunn, Tom

Chemistry of inorganic compounds

Halogen or compound thereof

Binary fluorine containing compound

423240S, 95263, C01B 908

Patent

active

061032123

ABSTRACT:
This invention is directed to a method for producing UHP tungsten hexafluoride by introducing an amount of crude tungsten hexafluoride to an evaporating process for separation into an amount of tungsten hexafluoride-containing volatile impurities and an amount of non-volatile metallic impurities; passing the amount of tungsten hexafluoride-containing volatile residue to a gas phase adsorption process for separation into an amount of semi-crude tungsten hexafluoride product and an amount of hydrogen fluoride non-volatile residue; and passing the amount of semi-crude tungsten hexafluoride product to a sparging system using UHP helium for separation into a non-volatile UHP tungsten hexafluoride product.

REFERENCES:
patent: 3711596 (1973-01-01), Hartig
patent: 3798875 (1974-03-01), Morris
patent: 3995011 (1976-11-01), Jache et al.
patent: 5324498 (1994-06-01), Streusand et al.
patent: 5328668 (1994-07-01), Sabacky et al.
patent: 5348723 (1994-09-01), Sabacky et al.

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