Coating processes – Direct application of electrical – magnetic – wave – or... – Electromagnetic or particulate radiation utilized
Reexamination Certificate
2007-09-18
2011-11-08
Chen, Bret (Department: 1715)
Coating processes
Direct application of electrical, magnetic, wave, or...
Electromagnetic or particulate radiation utilized
C427S597000, C427S115000, C427S124000, C427S578000, C427S255270, C427S255700
Reexamination Certificate
active
08053038
ABSTRACT:
A method is disclosed for making a titanium-based compound film of a poly-silicon solar cell. In the method, a ceramic substrate is made of aluminum oxide. The ceramic substrate is coated with a titanium film in an e-gun evaporation system. Dichlorosilane is provided on the titanium film by atmospheric pressure chemical vapor deposition. A titanium-based compound film is formed on the ceramic substrate.
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Chiang Chin-Chen
Huang Yu-Hsiang
Ku Chien-Te
Lan Shan-Ming
Ma Wei-Yang
Atomic Energy Council-Institute of Nuclear Energy Research
Chen Bret
Jackson Demian K.
Jackson IPG PLLC
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