Method for making thin film devices intended for solar cells...

Details Method for making thin film devices intended for solar cells... Method for making thin film devices intended for solar cells...

2006-04-04

2006-04-04

Nguyen, Tuan H. (Department: 2813)

Semiconductor device manufacturing: process

Bonding of plural semiconductor substrates

C438S458000

Reexamination Certificate

active

07022585

ABSTRACT:
In one inventive aspect, a thin film device is manufactured by (a) forming a porous semiconductor layer in the form of a thin film on an original substrate, the formation being immediately followed by (b) separation of the thin film by a lift-off process from the original substrate; (c) transfer of the thin film to a dummy support, the thin film not being attached to the dummy support; (d) fabrication of a device on top of the thin film; and (e) transfer and attachment of said device on said thin film on a foreign substrate.

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S. M. Sze: “Semiconductor Devies Physics and Technology” 1985, John Wiley and Sons, Murray Hill, New Jersey, USA, XP002311145 ISBN: 0-471-87424-8 *p. 441-442 *figure 11.

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