Method for making tapered opening for programmable...

Details Method for making tapered opening for programmable... Method for making tapered opening for programmable...

2006-05-16

2006-05-16

Cao, Phat X. (Department: 2814)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

C438S637000, C438S640000

Reexamination Certificate

active

07045383

ABSTRACT:
A method for making a tapered opening. The defined tapered opening is useful for the fabrication of programmable resistance memory elements. The programmable resistance memory material may be a chalcogenide.

REFERENCES:
patent: 5814527 (1998-09-01), Wolstenholme et al.
patent: 5942803 (1999-08-01), Shim et al.

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