Method for making surface acoustic wave devices

Details Method for making surface acoustic wave devices Method for making surface acoustic wave devices

1982-07-06

1983-11-08

Morgenstern, Norman

Coating processes

Electrical product produced

Piezoelectric properties

4271261, 310313B, 156656, 204 58, B05D 512

Patent

active

044142439

ABSTRACT:
A method is described for the fabrication of surface acoustic wave devices by the selective removal of one of the phases of a metallic eutectic solidified as a thin film having a lamellar morphology to form a first spaced array of metallic elements which then provides a self-aligned structure for the formation of a second array of metallic elements interdigitated with the elements of the first array.

REFERENCES:
patent: 3980904 (1976-09-01), Onodera et al.
patent: 4278492 (1981-07-01), Cross et al.

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