Method for making semiconductor device with integral fuse

Metal working – Method of mechanical manufacture – Assembling or joining

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29576B, 29591, 148 15, 148DIG55, 357 51, H01L 21225

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active

045984620

ABSTRACT:
A semiconductor device and method for making same having dielectrically isolated individual elements such as transistors, diodes, et al. Some of the isolated elements having fuses formed integral thereto.

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Isolation Techniques for Very Large Scale Integration, D. Beernaert, G. Schols, P. Van Iseghem, The Technical Journal.

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