Method for making selective subcollector heterojunction bipolar

Details Method for making selective subcollector heterojunction bipolar Method for making selective subcollector heterojunction bipolar

1996-03-05

1997-09-30

Niebling, John

Fishing, trapping, and vermin destroying

437 24, 437 26, 437 33, 437133, 148DIG10, 148DIG11, 148DIG72, H01L 21265

Patent

active

056725221

ABSTRACT:
A method for fabricating an HBT in which the subcollector-base junction, which contributes to the base-collector capacitance of the device, is reduced by using a selective subcollector. In particular, subcollector areas of the device that do not contribute to collector resistance reduction are eliminated, thereby reducing the subcollector area, which, in turn, reduces the base-collector capacitance. As such, the maximum power-gain frequency f.sub.max is increased.

REFERENCES:
patent: 3780359 (1973-12-01), Dumke et al.
patent: 4029522 (1977-06-01), De La Moneda
patent: 4081292 (1978-03-01), Aoki et al.
patent: 4789643 (1988-12-01), Kajikawa
patent: 4954457 (1990-09-01), Jambotkar
patent: 4967253 (1990-10-01), Jambotkar
patent: 4975126 (1990-12-01), Margali et al.
patent: 5028549 (1991-07-01), Chang et al.
patent: 5041393 (1991-08-01), Ahrens et al.
patent: 5064772 (1991-11-01), Jambotkar
patent: 5070028 (1991-12-01), Tews et al.
patent: 5098853 (1992-03-01), Clark et al.
patent: 5162243 (1992-11-01), Streit et al.
patent: 5242843 (1993-09-01), Aina
patent: 5243207 (1993-09-01), Plumton et al.
patent: 5252143 (1993-10-01), Chiang et al.
patent: 5283448 (1994-02-01), Bayraktaroglu
patent: 5286997 (1994-02-01), Hill
patent: 5298438 (1994-03-01), Hill
patent: 5336909 (1994-08-01), Katoh et al.
patent: 5362657 (1994-11-01), Henderdon et al.
Yang, "Microelectronic devices", 1988, pp. 180-183.
Song et al., "Self-Aligned InAlAs/InGaAs Heterojunction Bipolar Transistor with A Buried Subcollector Grown by Selective Epitaxy," IEEE Electron Device Letters, vol. 15, No. 4, Apr. 1994, pp. 123-125.

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