Method for making polarization independent silica optical circui

Details Method for making polarization independent silica optical circui Method for making polarization independent silica optical circui

1994-04-22

1995-11-14

Bovernick, Rodney B.

Optical waveguides

Integrated optical circuit

385129, G02B 612

Patent

active

054674158

ABSTRACT:
In accordance with the invention, a polarization independent optical device is fabricated by building the waveguide structure on a silicon substrate, adding a reinforcing layer of glass and removing regions of the silicon substrate underlying the waveguide structure. Alternatively, a reinforcing layer of glass can be added after the silicon in removed. Removal of the silicon underlying the waveguide structure eliminates polarization dependent spectral effects by eliminating the source of compressive strain, and the resulting glass reinforced structures are sufficiently robust for practical applications.

REFERENCES:
patent: 4178197 (1979-12-01), Marinace
patent: 4781424 (1988-11-01), Kawachi et al.
patent: 4889401 (1989-12-01), Klement et al.
patent: 5313535 (1994-05-01), Williams

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