Method for making piezoelectric sensing elements with gold-germa

Metal working – Piezoelectric device making

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310363, 310364, H04R 1700

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active

047698829

ABSTRACT:
A piezoelectric sensing element is formed from bonding two piezoelectric layers with an intermediate metallic film. The intermediate metallic film is comprised of two separate films, which were sputtered onto the inner surfaces of the respective piezoelectric layers, which are then placed in contact with each other. The combination of piezoelectric layers and film is next heated at an elevated temperature for fusing the respective sputtered alloy films so that the piezoelectric layers are bonded into a piezo-pair sensor. The layers to be joined are chamfered so that the center electrode appears as a notch on the finished piezo-pair to allow a connection to the center electrode for poling and sensing.

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